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Amorphous Silicon Carbide Thin Films
- Deposition, Characterization, Etching & Piezoresistive Sensors Applications
Engelsk Paperback
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Amorphous Silicon Carbide Thin Films
- Deposition, Characterization, Etching & Piezoresistive Sensors Applications
Engelsk Paperback

744 kr
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Om denne bog
Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.
Product detaljer
Sprog:
Engelsk
Sider:
118
ISBN-13:
9781613247747
Indbinding:
Paperback
Udgave:
ISBN-10:
1613247745
Kategori:
Udg. Dato:
12 jan 2012
Længde:
7mm
Bredde:
167mm
Højde:
233mm
Forlag:
Nova Science Publishers Inc
Oplagsdato:
12 jan 2012
Forfatter(e):
Kategori sammenhænge