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Fundamental Principles of Optical Lithography
- The Science of Microfabrication
Engelsk Paperback
Fundamental Principles of Optical Lithography
- The Science of Microfabrication
Engelsk Paperback

743 kr
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Om denne bog
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
Product detaljer
Sprog:
Engelsk
Sider:
544
ISBN-13:
9780470727300
Indbinding:
Paperback
Udgave:
ISBN-10:
0470727306
Kategori:
Udg. Dato:
16 nov 2007
Længde:
29mm
Bredde:
247mm
Højde:
174mm
Forlag:
John Wiley & Sons Inc
Oplagsdato:
16 nov 2007
Forfatter(e):
Kategori sammenhænge