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Flash Lamp Annealing
- From Basics to Applications
Engelsk Paperback
Flash Lamp Annealing
- From Basics to Applications
Engelsk Paperback

1.097 kr
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Om denne bog

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

Product detaljer
Sprog:
Engelsk
Sider:
288
ISBN-13:
9783030233013
Indbinding:
Paperback
Udgave:
ISBN-10:
3030233014
Kategori:
Udg. Dato:
14 aug 2020
Længde:
0mm
Bredde:
155mm
Højde:
235mm
Forlag:
Springer Nature Switzerland AG
Oplagsdato:
14 aug 2020
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